Physcial characterization of ultrathin high k dielectrics

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Physcial characterization of ultrathin high k dielectrics W.Vandervorsta,b, B.Brijs, H.Bender, O.T.Conard, J.Petry, O.Richard, S.Van Elshocht, A.Delabie, M.Caymax, S.De Gendt IMEC Kapeldreef 75, B-3001 Leuven, Belgium b also : INSYS, KULeuven, Belgium

ABSTRACT Targeting very thin equivalent oxides (

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