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Precise characterization of ultrathin nitride/oxide gate dielectrics by grazing x-ray reflectance and spectroscopic ellipsometry Pierre BOHER, Jean Philippe PIEL, and Jean Louis STEHLE SOPRA S.A.. 26 rue Pierre Joigneaux, 92270 BOIS COLOMBES, France. ABSTRACT Precise characterization of nitride/oxide gate structures becomes a challenging task due to the very thin thickness (

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